Time-Resolved Photon Emission Microscopy of Modern Integrated Circuits

Stas Polonsky ( polonsky-AT-us-DOT-ibm-DOT-com.gif )
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA

Diagnostics and failure analysis of integrated circuits, like any other facet of the semiconductor industry, has to continuously improve to remain viable. The long-term trend toward more complex, faster, denser devices with smaller features and more layers makes many conventional IC diagnostic techniques obsolete. For example, mechanical or e-beam probing find very limited use in diagnostics of modern microprocessors since the dense multi-level interconnecting wires cover the nodes of interest. For flip-chip packaged ICs these techniques are not applicable at all.

In my talk I present a new IC diagnostic technique based on the time-resolved photon emission microscopy - Picosecond Imaging Circuit Analysis (PICA). Invented at IBM, the technique is based on position- and time-resolved counting of single photons emitted by switching CMOS circuits.

I start with a description of the processes that lead to the light emission from modern transistors. I proceed with explaining how PICA uses single photons emitted from an IC to reconstruct its operation and present examples of practical uses of PICA to debug latest IBM microprocessors. I conclude my talk with the analysis of PICA applicability to future CMOS generations and its prospects for coming post-CMOS era.