Insulating oxides on silicon by molecular beam epitaxy for gate dielectric and
novel applications.
Supratik Guha
(

),
Lars-Ake Ragnarsson, Vijay Narayanan, Nestor A. Bojarczuk
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA
Insulating oxides grown on silicon have emerged as a major area of research
in the past few years. This has been primarily driven by the need to replace
silicon
dioxide as a gate dielectric in silicon CMOS with a higher dielectric
constant material that would provide a higher gate capacitance at a higher
physical thickness
and therefore a lower leakae current. As is the case in seeking the
replacement of
a highly successful material such as silicon dioxide within an established
processing infrastructure, the new gate oxide material needs to meet a host of
parallel requirements related to thermal stability, interfacial stability, and
microstructure in order to be a successful product. We will discuss the key
problems
facing the candidate insulating oxides and present results from molecular beam
epitaxially grown aluminum oxide/silicon and rare earth oxide/silicon
structures.
In addition to the near term technology need for a gate dielectric for CMOS,
recent
research in insulating oxides on silicon have lead to the development of
epitaxial
oxide/silicon heterostructures for novel applications. We will discuss the
growth and
properties of a lanthanum-yttrium oxide that may be grown epitaxially on
silicon
in lattice matched fashion, allowing us to grow (by MBE) epitaxial
oxide-silicon and silicon
quantum well based heterostructures.